With shrinking node size, modern integrated circuits are so complex that even the smallest contaminant can create costly defects. Ultrapure water (UPW) is vital to cleaning wafers in the fabrication plant, and to prevent failure, must be free of organic and inorganic compounds, particulates, and other contaminants. Meanwhile, water shortages pose a significant threat to expansion, and processes generate wastewaters with hazardous metals and solvents. Major electronics companies are responding by recycling water internally to high levels and recovering chemicals from waste to tighter standards.

Jacobi provides a product line tailored for high-purity UPW with low levels of contaminants. Our products undergo specialized treatment to remove organic residuals left after primary manufacturing and are fully regenerated to the H+ and OH- forms. We enable our customers to reliably supply UPW to the fab with >18.2 MΩ·cm resistivity, low TOC leakage (< 5 ppb), on-line particles (>0.05 µm), and silica (max. 0.5 µg). Our solutions also enable our customers to improve sustainability goals by reusing water, recovering chemicals, and improving waste discharge to the environment.